Client Success Story
Development of AC-DC Power Supplies for Lithography Equipment
Company
Semiconductor
Client Challenge
The client, a leading semiconductor equipment manufacturer based in the United States, required a highly specialized AC-DC power supply solution for their advanced lithography systems. The challenge was multifaceted:
- Precision Power Requirements: The lithography systems needed a stable, noise-free DC output with exacting voltage and current tolerances to support highly sensitive photolithography processes. The power supplies had to operate at high efficiency without introducing electromagnetic interference (EMI) or ripple, which could affect the quality and accuracy of the semiconductor chips produced.
- Environmental Constraints: The power supplies needed to be tested and validated in a controlled environment, specifically within a semiconductor clean room, to ensure that no contaminants or particulate matter would compromise their performance.
- Space and Form Factor: The power supplies had to meet stringent size constraints due to the limited space available in the lithography system enclosures. Additionally, the design needed to accommodate future scalability for potential upgrades in voltage and current requirements.
- Reliability and Durability: Given the critical nature of the equipment in semiconductor production, the power supplies were required to demonstrate exceptional reliability over long-term operations with minimal maintenance.
Solution Proposed by Zealogics:
Zealogics, a leading provider of power electronics solutions, proposed a tailored solution for the AC-DC power supply requirement, leveraging extensive expertise in high-performance power systems and semiconductor applications.
Design Approach:
- High-Frequency Switching Technology: Zealogics developed an AC-DC converter utilizing high-frequency switching technology, specifically a resonant converter topology that ensures high efficiency and low electromagnetic interference (EMI). This design choice minimized ripple and noise, ensuring clean DC output essential for the photolithography process. The use of advanced silicon carbide (SiC) MOSFETs was incorporated to enhance efficiency, particularly in the higher-frequency switching regime, and to reduce thermal losses during operation.
- Output Voltage and Current Precision: The power supply was engineered with fine voltage regulation capabilities, ensuring minimal deviation from the set output voltage and current under varying load conditions. A digital feedback loop was integrated, using high-precision analog-to-digital converters (ADC) and DSP-based controllers to monitor and adjust real-time output for exacting tolerances.
- Thermal Management and Compact Form Factor: The power supply was designed with sophisticated thermal management techniques, including optimized PCB layouts, heat sinks, and active cooling methods. Advanced thermal modeling was employed to ensure that the system remained within safe operating temperatures even during continuous operation at full load. The compact form factor was achieved through custom-designed, high-density power components that adhered to the client’s space constraints.
- Electromagnetic Compatibility (EMC) and Clean Room Compatibility: Given the importance of clean room operations, Zealogics placed significant emphasis on the system’s compliance with stringent electromagnetic compatibility (EMC) standards. Shielding and filtering techniques were integrated to prevent electromagnetic interference, ensuring the power supply would operate without affecting surrounding sensitive equipment. Additionally, the power supplies were designed with smooth edges and sealed enclosures to minimize particulate generation, making them suitable for clean room testing and deployment.
Prototyping and Testing: The prototype units were built, integrated into the client’s lithography systems, and rigorously tested in a semiconductor clean room environment in India. Testing included:
- Noise and Ripple Tests: Conducted using high-precision oscilloscopes and spectrum analyzers to ensure the output DC voltage remained within the required limits of noise and ripple, in accordance with industry standards for semiconductor equipment.
- Thermal Cycling and Stress Tests: The power supplies underwent thermal cycling and accelerated life testing to simulate long-term operational stress, ensuring high reliability under varying ambient temperatures.
- EMC Compliance Testing: Compliance with international EMC standards was validated through both radiated and conducted emissions tests to ensure the unit would not interfere with other sensitive electronic systems in the lithography setup.
Logistics and Shipping: After successful validation and testing in India, the power supplies were carefully packed to protect against mechanical stress and shipping hazards. Given the sensitive nature of the product, anti-static packaging was used, along with custom protective enclosures to shield the units during transportation. The completed units were then shipped to the United States under a controlled logistics plan, ensuring they arrived safely and on schedule.
Outcome and Benefits:
- High Performance: The power supplies provided the necessary stability and efficiency required for the precision demands of semiconductor lithography, contributing to enhanced overall system performance and productivity.
- Cost and Time Efficiency: By leveraging Zealogics’ design expertise and manufacturing capabilities in India, the client realized significant cost savings without compromising on quality. Additionally, the fast turnaround time ensured the client could meet their aggressive project timelines.
- Scalability: The modular design of the power supply allowed for future scalability, enabling the client to easily upgrade the system in response to evolving requirements for voltage or current adjustments.
- Seamless Integration: The power supplies integrated seamlessly into the client’s lithography systems, meeting all the performance, form factor, and regulatory requirements outlined in the original specification.
Conclusion
Zealogics’ ability to deliver a customized, high-performance AC-DC power supply solution for lithography equipment demonstrated its strong engineering capability in the semiconductor sector. The success of this project highlights Zealogics’ proficiency in designing power systems that meet the most stringent requirements, ensuring that the client’s equipment operates at optimal levels while contributing to the advancement of semiconductor manufacturing technologies.